使用氣體（如H2）鼓泡汽化體（如TCS），在恒定的溫度和壓力下凝結該混合氣體，并以特定的濃度供應。
Use gas（e.g:xhydrogen) babbling system Vaporize Liquid(e.g: TCS), condense this mixed gas at a constant temperature and pressure, and supply at the specified concentration.
蒸餾法高度純化High purification by distillation method
實現穩定濃度狀態下供應Supply at stable concentration
大幅減少待機時排氣Significant reduction of vent gas at standby
1臺PGM可供應3個腔體Supplied to 3 chambers with 1 unit
